PHP MBE grade Al 6N5
|
PHP MBE grade Al 6N5 |
|
| Compared GDMS Analysis for MBE grade Al | ||||||
| Elements | Z | PHP 6N5 Typical on 18 different lots | 6N5 PHP Spec (max) | Competitor 1 Europe | Competitor 2 Japan | |
| Be | 2 |
0.14
|
1.5
|
nc
|
5.0
|
|
| Mg | 10 |
5.0
|
28
|
140
|
10
|
|
| Al | 11 |
Matrix
|
Matrix
|
Matrix
|
Matrix
|
|
| Si is the major metallic impurity in Al | 12 |
37
|
100
|
1000
|
130
|
|
| Ca | 17 |
7.7
|
70
|
< 50
|
50
|
|
| Sc | 18 |
32
|
30
|
nc
|
30
|
|
| Ti | 19 |
78
|
300
|
60.0
|
50
|
|
| V | 20 |
25
|
100
|
nc
|
30
|
|
| Cr | 21 |
51
|
150
|
50.0
|
50
|
|
| Mn | 22 |
48
|
50
|
40.0
|
50
|
|
| Fe | 23 |
6.3
|
280
|
290.0
|
850
|
|
| Co | 24 |
0.39
|
1.0
|
nc
|
5.0
|
|
| Ni | 25 |
1.6
|
4.0
|
150.0
|
30
|
|
| Cu | 26 |
50
|
50
|
130.0
|
180
|
|
| Zn | 27 |
5.3
|
9.0
|
360.0
|
10
|
|
| Ga | 28 |
3.7
|
10 |
< 50
|
50
|
|
| Ge | 29 |
2.5
|
10
|
nc
|
50
|
|
| As | 30 |
0.3
|
1.0
|
nc
|
5.0
|
|
| Se | 31 |
5.0
|
5.0
|
nc
|
10
|
|
| Br | 32 |
10
|
10
|
nc
|
10
|
|
| Rb | 33 |
0.5
|
1.0
|
nc
|
1.0
|
|
| Sr | 34 |
0.6
|
2.0
|
nc
|
5.0
|
|
| Y | 35 |
0.3
|
2.0
|
nc
|
5.0
|
|
| Zr | 36 |
5.4
|
50
|
nc
|
10
|
|
| Nb | 37 |
1.2
|
4.0
|
nc
|
5
|
|
| Mo | 38 |
3.4
|
10
|
< 50
|
10
|
|
| Ru | 39 |
0.36
|
1.0
|
nc
|
10
|
|
| Pd | 41 |
0.64
|
3.0
|
nc
|
10
|
|
| Ag | 42 |
0.70
|
10
|
10.0
|
10
|
|
| Cd | 43 |
2.7
|
25
|
nc
|
10
|
|
| In | 44 |
1.2
|
5.0
|
nc
|
10
|
|
| Sn | 45 |
3.78
|
14
|
nc
|
10
|
|
| Sb | 46 |
0.72
|
5.0
|
nc
|
10
|
|
| Te | 47 |
0.75
|
5.0
|
nc
|
10
|
|
| Cs | 49 |
0.11
|
0.50
|
nc
|
5.0
|
|
| Ba | 50 |
0.27
|
12
|
nc
|
5.0
|
|
| La | 51 |
0.18
|
0.80
|
nc
|
5.0
|
|
| Ce | 52 |
0.18
|
1.0
|
nc
|
5.0
|
|
| Pr | 53 |
0.28
|
0.30
|
nc
|
5.0
|
|
| Nd | 54 |
0.32
|
2.0
|
nc
|
5.0
|
|
| Sm | 55 |
0.20
|
0.20
|
nc
|
5.0
|
|
| Eu | 56 |
0.30
|
0.3
|
nc
|
5.0
|
|
| Gd | 57 |
0.70
|
0.70
|
nc
|
5.0
|
|
| Tb | 58 |
0.20
|
0.20
|
nc
|
5.0
|
|
| Dy | 59 |
0.50
|
0.50
|
nc
|
5.0
|
|
| Ho | 60 |
0.30
|
0.30
|
nc
|
5.0
|
|
| Er | 61 |
0.50
|
0.50
|
nc
|
5.0
|
|
| Tm | 62 |
0.40
|
0.40
|
nc
|
5.0
|
|
| Yb | 63 |
0.40
|
0.40
|
nc
|
5.0
|
|
| Lu | 64 |
0.30
|
0.30
|
nc
|
5.0
|
|
| Hf | 65 |
0.31
|
3.00
|
nc
|
5.0
|
|
| W | 67 |
2.06
|
3.00
|
nc
|
10
|
|
| Re | 68 |
0.27
|
2.00
|
nc
|
5.0
|
|
| Os | 69 |
0.22
|
0.6
|
nc
|
5.0
|
|
| Ir | 70 |
0.24
|
1.0
|
nc
|
5.0
|
|
| Pt | 71 |
0.47
|
3.0
|
nc
|
10
|
|
| Au | 72 |
19
|
20
|
nc
|
50
|
|
| Hg | 73 |
1.3
|
4.0
|
nc
|
10
|
|
| Tl | 74 |
0.23
|
0.8
|
nc
|
5.0
|
|
| Pb | 75 |
1.9
|
3.7
|
nc
|
5.0
|
|
| Bi | 76 |
0.31
|
3.0
|
nc
|
5.0
|
|
| Alpha emitters | ||||||
| Th | 77 |
0.031
|
0.05
|
nc
|
0.1
|
Alpha emitter origin |
| U | 78 |
0.038
|
0.05
|
nc
|
0.06
|
Alpha emitter origin |
| Total metallics (ppb) |
421
|
1411
|
2380
|
1 916
|
||
| Analyzed elements |
61
|
61
|
13
|
61
|
||
| Non metallics | ||||||
| C | 4 |
3254
|
6 000
|
nc
|
12 000
|
non metallic |
| N | 6 |
15000
|
15 000
|
< 5000
|
15 000
|
non metallic |
| O | 7 |
3 487
|
15 000
|
< 20 000
|
20 000
|
non metallic |
| Others | ||||||
| B | 3 |
0.5
|
10
|
310.0
|
180
|
|
| Na | 9 |
2.6
|
13
|
30.0
|
10
|
|
| P | 13 |
0.38
|
21
|
30.0
|
10
|
|
| S | 14 |
2.5
|
100
|
5.0
|
10
|
|
| F | 8 |
25
|
25
|
nc
|
50
|
|
| Li | 1 |
0.17
|
1.4
|
< 5
|
5.0
|
|
| Cl | 15 |
4.0
|
15
|
nc
|
10
|
|
| K | 16 |
8.0
|
8.0
|
< 50
|
10
|
|
| I | 48 |
0.23
|
0.7
|
nc
|
5.0
|
|
| Slugs Dia 10 mm x L 40 mm (8.5 g) | ||||||
| Slugs Dia 6 mm x L 20 mm (1.5 g) | ||||||
| Slugs Dia 40 mm x L 30 mm (100 g) | ||||||
| Slugs Dia 20 mm x L 60 mm (50 g) | ||||||